Microstructure and magnetic properties of oxidized titanium nitride thin films in situ grown by pulsed laser deposition
نویسندگان
چکیده
Different oxidation states of titanium nitride thin films, including pure TiN(h 0 0), TiN1−xOx(h 0 0), Ti2O3(0 0 l) and pure anatase TiO2(0 0 l), were prepared by pulsed laser deposition with various oxygen pressures (PO2) using a TiN target. Elaborative evolutions of the crystal and electronic structures of the obtained films were examined systematically by x-ray diffraction and x-ray absorption spectroscopy. We found that the Ti2O3(0 0 l) film, which was prepared at oxygen pressures PO2 = 10−4 Torr, exhibited the maximum room temperature ferromagnetism (RTFM) behaviour. The bound magnetic polaron model is used to clarify the origin of RTFM in these films. (Some figures may appear in colour only in the online journal)
منابع مشابه
Structure and mechanical properties of titanium nitride thin films grown by reac - tive pulsed laser deposition
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